Ta/TaN 복합 다층 피막의 기계적 특성

강영권; 이종무; 최상욱; Young-Kwon Kang; Chongmu Lee; S.W. Choi

Korean Journal of Materials Research, Vol.9, No.8, 837-842, August, 1999

Export Citation

Ta/TaN 복합 다층 피막의 기계적 특성

Mechanical Properties of Ta/TaN Multilayer

강영권, 이종무 , 최상욱

인하대학교 재료공학부

Young-Kwon Kang, Chongmu Lee , and S.W. Choi

School of Materials Science and Engineering, Inha University, Inchon 402-751, Korea

초록

Ta/TaN 다층피막구조는 경도는 떨어지지만 연성이 큰 Ta 막과 취성을 가지며 경도가 높은 TaN 막을 교대로 반복하여 만든 다층구조로서 경도와 연성의 장점이 잘 조화되어 높은 인성을 나타낼 것으로 기대된다. 본 연구에서는 고속도강 기판위에 Ta/TaN 복합다층피막과 compositional gradient Ta-TaN 막을 각각 반응성 스퍼터링에 의하여 증착하고 열처리에 따른 경도 및 접착성을 조사하였다. N 2 /Ar 유량비가 0.4일 때 결정성이 가장 우수한 TaN 막이 얻어지며, Ta/TaN 복합다층피막의 경도 및 스크래치 테스트 결과도 가장 우수하였다. 또한 Ta/TaN 복합다층피막 증착후의 어닐링 처리 시 어닐링 온도가 증가할수록 피막의 경도와 접착성이 악화되었으며, compositional modulation wavelength가 감소함에 따라 Ta/TaN 복합다층피막의 경도는 증가하지만 접착성은 wavelength에 대한 의존성이 약하게 나타났다. 그리고 compositional gradient Ta-TaN 막 증착후의 어닐링 처리 시 경도와 스크래치 테스트 값은 각각 20 0 ? C 와 40 0 ? C 에서 최대값을 나타내었다.

The Ta/TaN multilayer structure with repeating layers of a poly-crystalline Ta layer of high ductility and a TaN layer of high hardness is expected to exhibit toughness. This paper reports the results on the hardness and the adhesion strength of Ta/TaN multilayers and compositional gradient Ta/TaN layers deposited on the high speed steel substrate by reactive sputtering as a function of annealing temperature. The TaN film deposited with the N 2 /Ar ratio of 0.4 in the reactive sputtering process exhibits the highest crystallinity, and the highest hardness and the results of scratch test of the Ta/TaN multilayers. The hardness and adhesion strength of the Ta/TaN multilayers becomes deteriorated with increasing the annealing temperature in the heat treatment right after depositing the layers. Therefore, post-annealing treatments are not desirable in the case of the Ta/TaN multilayers from the standpoint of mechanical properties. Also the hardness of Ta/TaN multilayers increases with decreasing the compositional modulation wavelength, but the adhesion property of the layers is nearly independent of the wavelength. On the other hand, the compositional gradient Ta/TaN film exhibits the highest hardness and the value of scratch test for the post-annealing temperatures of 20 0 ? C and 40 0 ? C , respectively. This tendency of the compositional gradient Ta/TaN films differs from that of the Ta/TaN multilayers.

[References]

Horvoth E, Perry AJ, Wear, 48, 217 (1978)
Sundgren JE, Hentzel HTG, J. Vac. Sci. Technol., A4, 2259 (1986)
Koehler JS, Phys. Rev., B2, 547 (1970)
Holleck H, J. Vac. Sci. Technol., A4, 2661 (1986)
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Johansen OA, Dontje JH, Zenner RLD, Thin Solid Films, 153, 75 (1987)
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Huang RF, Wen LS, Guo LP, Gong J, Yu BH, Surf. Coat. Tech., 50, 97 (1992)
Shih KK, Dove DB, Appl. Phys. Lett., 61, 654 (1992)
Shinn M, Hultman L, Barnett SA, J. Mater. Res., 7, 901 (1992)

[Related Articles]

[1] Horvoth E, Perry AJ, Wear, 48, 217 (1978)

[2] Sundgren JE, Hentzel HTG, J. Vac. Sci. Technol., A4, 2259 (1986)

[3] Koehler JS, Phys. Rev., B2, 547 (1970)

[4] Holleck H, J. Vac. Sci. Technol., A4, 2661 (1986)

[5] Molarius JM, Korhonen AS, Harju E, Lappaainen R, Surf. Coat. Tech., 33, 117 (1987)

[6] Johansen OA, Dontje JH, Zenner RLD, Thin Solid Films, 153, 75 (1987)

[7] Sproul WD, J. Vac. Sci. Technol., A4, 2874 (1986)

[8] Duckworth RG, Thin Solid Films, 73, 275 (1980)

[9] Han JH, Oh SG, Tech. paper (1991)

[10] Huang RF, Wen LS, Guo LP, Gong J, Yu BH, Surf. Coat. Tech., 50, 97 (1992)

[11] Shih KK, Dove DB, Appl. Phys. Lett., 61, 654 (1992)

[12] Shinn M, Hultman L, Barnett SA, J. Mater. Res., 7, 901 (1992)