산소분압에 따른 Fe-Sm-O계 박막의 연자기적 성질

윤대식; 조완식; 고은수; 이영; 박종봉; 김종오; T.S. Yoon; W.S. Cho; E.S. Koo; Ying Li; J.B. Park; C.O. Kim

Korean Journal of Materials Research, Vol.10, No.11, 755-759, November, 2000

Export Citation

산소분압에 따른 Fe-Sm-O계 박막의 연자기적 성질

The Influence of O 2 Partial Pressure on Soft Magnetic Properties of As-deposited Fe-Sm-O Thin Films

윤대식, 조완식¹, 고은수, 이영, 박종봉, 김종오

충남대학교 공과대학 재료공학과
¹고기능성 자성재료 연구센터

T.S. Yoon, W.S. Cho¹, E.S. Koo, Ying Li, J.B. Park, and C.O. Kim

Division of Materials Engineering, Chungnam National University, Taejeon 305-764, Korea
¹Research Center for Advanced Magnetic Materials, Taejeon 305-764, Korea

초록

RF magnetron sputtering법으로 초미세결정 Fe-Sm-O계의 박막을 상온에서 제작하여 산소분압에 따른 포화자화, 보자력, 고주파에서의 투자율(100MHz)을 조사하였다. 최적조건인 5%의 산소분압에서 제조한 초미세결정 Fe(sub)83.4Sm(sub)3.4O(sub)13.2박막은 포화자속밀도 18kG, 보자력 0.82 Oe, 실효투자율 (0.5~100MHz) 2,600 이상의 우수한 연자성을 나타내었다. 산소분압이 증가함에 따라 α -Fe 결정립의 크기가 감소하여 10%이상의 산소분압에서는 FeO가 생성되어 연자기적 성질이 열화되었다. Fe-Sm-O계 박막의 전기비저항은 산소분압이 증가함에 따라 증가하는 경향을 나타내었으며 우수한 연자기적 성질을 가지는 Fe(sub)83.4Sm(sub)3.4O(sub)13.2박막의 경우, 전기비저항은 130 μ Ω cm이었다. 따라서 미세하게 형성된 α -Fe 결정립과 높은 전기비저항 때문에 초미세결정 Fe(sub)83.4Sm(sub)3.4O(sub)13.2박막이 고주파에서 우수한 연자기적 성질을 가지는 것으로 판단된다.

The influence of O 2 partial presure on saturation magnetization, coercivity and effective permeability(0.5~100MHz) of as-deposited Fe-Sm-O thin films, which were fabricated by RF magnetron reactive sputtering method, were investigated. The nanocrystalline Fe(sub)83.4Sm(sub)3.4O(sub)13.2 thin film fabricated at O 2 partial pressure of 5% exhibits the best magnetic softness with saturation magnetization of 18kG, coercivity of 0.82 Oe and effective permeability about 2,600 at 0.5~100MHz. α -Fe grain size is decreased with increasing O 2 partial pressure. In case of O 2 partial pressure of 10%, it is observed that FeO compound is formed and soft magnetic properties are decreased. The electrical resistivity of Fe-Sm-O thin films were increased with increasing O 2 partial pressure, the electrical resistivity of Fe(sub)83.4Sm(sub)3.4O(sub)13.2 thin film with the best soft magnetic properties was 130 μ Ω cm. Therefore, It is assumed that the good soft magnetic properties of Fe(sub)83.4Sm(sub)3.4O(sub)13.2 thin film results from high electrical resistivity and decreasing α -Fe grain size due to precipitation of Sm-Oxide phase.

Keywords:thin films;soft magnetic;resistivity

[References]

Arai KI, Yamaguchi M, J. Magn. Soc. Jpn., 17, 642 (1993)
Hawakawa Y, Makino A, Fujimori H, Inoue A, J. Appl. Phys., 81, 3747 (1997)
Hosono A, Shimada Y, J. Magn. Soc. Jpn., 12, 259 (1988)
Fujimori H, Scri. Metal. Mater., 33, 1625 (1995)
Lee HJ, Mitani S, Shima T, Nagata S, Fujimori H, J. Magn. Soc. Jpn., 23, 246 (1999)
Lee HJ, Mitani S, Shima T, Fujimori H, J. Magn. Soc. Jpn., 22, 625 (1998)
Hawakawa Y, Hasegawa N, Makino A, Mitani S, Fujimori H, J. Magn. Soc. Jpn., 20, 425 (1996)
Furukawa S, Ohnuma S, Matsumoto F, Fujimori H, Masumoto T, J. Magn. Soc. Jpn., 18, 271 (1994)
Park JY, Kim JY, Kim KY, Han SH, Kim HJ, J. Kor. Magn. Soc., 7, 243 (1997)
Naoe M, Yamaga M, Terada N, IEEE Trans. Magn., MAG-21, 1900 (1985)
Kataoka N, Hosokawa M, Inoue A, Masumoto T, Jpn. J. Appl. Phys., 28, L462 (1989)
Kataoka N, Hosokawa M, Inoue A, Masumoto T, Mater. Trans. JIM., 31, 429 (1990)
Sputtering by Particle Bombardment Ⅱ, Betz G, Wehner GK, Behrishc R(ed.) Topics in Applied Physics/ Springer, 1983 (1983)
Cullity BD, Elements of X-ray Diffraction(Second Edition)/ 1978 (1978)

[Referenced By]

[1] Arai KI, Yamaguchi M, J. Magn. Soc. Jpn., 17, 642 (1993)

[2] Hawakawa Y, Makino A, Fujimori H, Inoue A, J. Appl. Phys., 81, 3747 (1997)

[3] Hosono A, Shimada Y, J. Magn. Soc. Jpn., 12, 259 (1988)

[4] Fujimori H, Scri. Metal. Mater., 33, 1625 (1995)

[5] Lee HJ, Mitani S, Shima T, Nagata S, Fujimori H, J. Magn. Soc. Jpn., 23, 246 (1999)

[6] Lee HJ, Mitani S, Shima T, Fujimori H, J. Magn. Soc. Jpn., 22, 625 (1998)

[7] Hawakawa Y, Hasegawa N, Makino A, Mitani S, Fujimori H, J. Magn. Soc. Jpn., 20, 425 (1996)

[8] Furukawa S, Ohnuma S, Matsumoto F, Fujimori H, Masumoto T, J. Magn. Soc. Jpn., 18, 271 (1994)

[9] Park JY, Kim JY, Kim KY, Han SH, Kim HJ, J. Kor. Magn. Soc., 7, 243 (1997)

[10] Naoe M, Yamaga M, Terada N, IEEE Trans. Magn., MAG-21, 1900 (1985)

[11] Kataoka N, Hosokawa M, Inoue A, Masumoto T, Jpn. J. Appl. Phys., 28, L462 (1989)

[12] Kataoka N, Hosokawa M, Inoue A, Masumoto T, Mater. Trans. JIM., 31, 429 (1990)

[13] Sputtering by Particle Bombardment Ⅱ, Betz G, Wehner GK, Behrishc R(ed.) Topics in Applied Physics/ Springer, 1983 (1983)

[14] Cullity BD, Elements of X-ray Diffraction(Second Edition)/ 1978 (1978)