Thin Solid Films, Vol.571, 543-547, 2014
A liquid crystal variable retarder-based reflectance difference spectrometer for fast, high precision spectroscopic measurements
We present a liquid crystal variable retarder (LCVR)-based design for reflectance difference (RD) spectrometry, which offers one high quality RD spectrum in the visible range within several seconds. The measurement principle and the instrument development of this design are provided. As the LCVR is a key component, investigations are focused on its wavelength-dependent optical characteristics, the systematic errors induced by its imperfections, and the temperature effect on the measurement results. With careful calibration and data correction, the qualities of corrected RD spectra, defined as standard deviations of the RD signals as a function of wavelength and time, are better than 3 x 10(-4) and 1.3 x 10(-3), respectively. (C) 2013 Published by Elsevier B.V.
Keywords:Reflectance difference spectrometer;Liquid crystal variable retarder;Systematic errors;Measurement quality