화학공학소재연구정보센터
Solid-State Electronics, Vol.101, 95-105, 2014
Cluster beam synthesis of metal and metal-oxide nanoparticles for emerging memories
In this work we present results concerning the cluster beam synthesis of metal and metal-oxide nanoparticles together with their applications in emerging memories like nanoparticle Flash memories and resistive switching memories. Regarding the former, very large memory windows of 7-8 V are presented at voltages below 10 V using Ni, Pt or Au nanoparticles. Regarding the latter, metal insulator metal devices based upon titanium oxide nanoparticle films show switching voltages well below 1 V with high-to-low resistance ratios as high as 1000. An in depth analysis of the physical and electrical properties of the titanium oxide nanoparticle films allows to shine light onto the physics behind the switching mechanism. (C) 2014 Elsevier Ltd. All rights reserved.