In this paper, we investigate three different procedures for making modulated surface textures (MST) on glass substrates and show the application of these substrates to microcrystalline silicon solar cells. MST substrates have broader surface angle distribution (AD) than a single textured glass substrate and this distribution peaks at higher angles. Therefore, (i) the haze in reflection of MST substrates covered with an Ag layer is over 99% in the wavelength range above 350 nm, which is higher than in the case of a single textured glass substrate; (ii) more reflected light is scattered into higher angles, resulting in a broader reflective angular intensity distribution (AID) in air. These properties lead to a higher J(sc) for n-i-p microcrystalline silicon solar cells deposited on the MST substrates compared to cells deposited on single textured glass substrate. A solar cell deposited on a MST glass substrate with smoother peaks shows the highest electrical performance (V-oc x FF value), because of a lower density of defective regions. The best cell achieved in this work has an active-area efficiency of 10.49%, with a V-oc of 0.532 V, a J(sc) of 26.36 mA/cm(2), and a FF of 74.8% for a 3-mu m thick absorber layer. (C) 2014 Elsevier B.V. All rights reserved.