This study adopts a modified atomic layer deposition (ALD) process to prepare size-controlled Pt nanoparticles on the surface of carbon black, showing superior catalytic activity toward ethanol oxidation. Two types of ALD precursors, (methylcyclopentadienyl) trimethyl platinum (MeCpPtMe3) and oxygen (O-2), were used to grow Pt deposits at 250 degrees C. For 30 ALD cycles, the pulse period of MeCpPtMe3 serves as a key factor in controlling the particle size and the weight loading of Pt deposits. The Pt growth rates over the carbon support can be attributed to the surface coverage of Pt-O* sites, diffusion rate of MeCpPtMe3, and lateral interaction between each active site. Since the MeCpPtMe3 dose strongly affects the Pt particle size and the deposit density, the growth of ALD Pt can be assumed as being diffusionlimited. Because of the surface-catalyzed reaction steps, the small-sized ALD-Pt catalysts offer better catalytic activity, CO tolerance, and long-term stability as compared with the large-sized ones. On the basis of the results, the modified ALD technique exhibits a great potential for tuning the Pt particle size and weight loading onto the carbon support for fuel cell application. (C) 2014 Elsevier B.V. All rights reserved.