Interfacial characteristics and diffusion behavior of Ti1-xZrxN coatings under thermomechanical stress were investigated, in terms of morphologies and depth profiles, after pulsed laser ablation. TiZrN coatings were deposited on SUS304 substrates, using TiZr compound targets with Ti:Zr wt.% ratio of 90:10, 70:30, and 50:50. XRD patterns showed the same growth orientations of TiN and ZrN as (1 1 1), (2 0 0), and (2 2 0) in all coating specimens. The lattice parameters and the microhardness increased through solid solution with the substitutions of Zr to the Ti sites. Spalling of the coating layer was observed in the specimen of 10% wt.% Zr ratio after laser ablation. Delamination was suppressed as the substitution of Zr increased, and it could be attributed to the formation of ZrN which can promote heat transfer in the coating layer faster than TiN. SIMS depth profiles revealed that the diffusion distance of the coating (Ti, Zr) and the substrate (Cr, Fe) atoms decreased, due to diffusion path reduction by the solid solution effects. (C) 2014 Elsevier B.V. All rights reserved.