SU-8 photoresist polymer is widely used in the fabrication of microdevices. However, for biological applications, the problem of efficiently modifying SU-8 surfaces without perturbing roughness has not been successfully resolved. We present UV/ozone (UVO) surface pre-treatment as an effective method to increase the hydrophilicity of SU-8 films without affecting surface roughness, thus improving specific covalent binding of bio-molecules. We demonstrate that 305 UVO treatment suffices to create carboxyl groups at the surface that can then be used for high density binding of molecules via amide bond formation. We further demonstrate that a two-step surface modification where the surface is first protected with an ethylene glycol monolayer leads to an increase in binding specificity. Finally, to illustrate the controlled binding and accessibility of immobilized molecules, we show three cycles of reversible interactions between anti-tamra antibody and tamra-cadaverine immobilized on the surface of SU-8. (C) 2014 Elsevier B.V. All rights reserved.