화학공학소재연구정보센터
홈 로그인 로그아웃 연락처 사이트맵
Korean Journal of Materials Research, Vol.12, No.8, 661-668, August, 2002
DOI10.3740/MRSK.2002.12.8.661  Export Citation
In-line 마그네트론 스퍼터 장치를 사용하여 산소 분위기에서 제작한 Ag 박막의 특성
Properties of Ag Thin Films Deposited in Oxygen Atmosphere Using in- line Magnetron Sputter System
구대영, 김원목1, †, 조상무2, 황만수2, 이인규, 정병기1, 이택성1, 이경석1, 조성훈3
  • 한국항공대학교 항공재료공학과
  • 1한국과학기술연구원 재료연구부
  • 2아이티엠(주)
  • 3아주대학교 분자과학기술과
Dae Young Ku, Won Mok Kim1, †, Sang Moo Cho2, Man Soo Hwang2, In Kyu Lee, Byung-ki Cheong1, Taek Sung Lee1, Kyeong Seok Lee1, and Sunghun Cho3
  • Department of Materials Engineering, Hankuk Aviation University, Seoul 421-791, Korea
  • 1Materials Division, Korea Institute of Science and Technology, Seoul 136-791, Korea
  • 2ITM Inc, Anyang, 431-060, Korea
  • 3Department of Molecular Science and Technology, Ajou University, Suwon 442-794, Korea
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A study was made to examine the electrical, compositional, structural and morphological properties of Ag thin films deposited by DC magnetron sputtering in O 2 atmosphere with deposition temperature from room temperature to 15 0 ? C using in-line sputter system. The Ag films deposited at temperature above 100 ? C in oxygen atmosphere gave a similar specific resistivity to and even lower oxygen content than those deposited using pure Ar sputter gas The Ag films deposited with pure Ar gas was mainly composed of crystallites with [111] preferred orientation, while, for those deposited in oxygen atmosphere, more than 50% of the volume was composed of crystallites with [100] orientation. The difference in the micro structure did not cause any difference in the specific resistivity of Ag films. The results showed that the transparent conducting oxide films and the Ag films could be processed sequentially in the same deposition chamber with careful control of deposition temperature, which might result in a cost reduction for constructing the large scale in-line deposition system.
Keywords:Transparent conducting films;Ag films;Specific resistivity;Oxygen;In-line sputter
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