스크린 인쇄법을 이용한 NASICON 후막 SO 2 가스 센서의 제조 및 특성

배재철; 이상태; 전희권; 방영일; 이덕동; 허증수; J.C. Bae; S.T. Lee; H.K. Jun; Y.I. Bang; D.D. Lee; J.S. Huh

Korean Journal of Materials Research, Vol.13, No.2, 115-119, February, 2003

DOI10.3740/MRSK.2003.13.2.115 Export Citation

스크린 인쇄법을 이용한 NASICON 후막 SO 2 가스 센서의 제조 및 특성

Fabrication and Sensing Properties of NASICON Thick Film SO 2 Gas Sensor Using Screen-print Method

배재철, 이상태, 전희권, 방영일¹, 이덕동¹, 허증수 ^†

경북대학교 재료금속공학과
¹경북대학교 전자공학과

J.C. Bae, S.T. Lee, H.K. Jun, Y.I. Bang¹, D.D. Lee¹, and J.S. Huh^†

Dept. of Materials Science and Metallurgy, Kyungpook National University, Korea
¹Dept. of Electronic and Electrical Eng., Kyungpook National University, Korea

E-mail:

The thick film type sensor having Pt/Na Super Ionic Conductor(NASICON) solid electrolyte/Pt/ Na 2 SO 4 /Pt catalyst system for SO 2 gas was fabricated by screen-print method. The phase of Na Super Ionic Conductor solid electrolyte sintered at different temperature of 1050, 1150, 1250 ? C and for different time of 1.5, 2.5, 3.5 hr were investigated by XRD. The Electromotive Force variation of the sensor with SO 2 concentrations and operating temperatures were investigated. The major phase of Na Super Ionic Conductor film sintered at 115 0 ? C for 3.5 hr was sodium zirconium silicon phosphate( Na 3 Zr 2 Si 2 PO 12 ). The Nernst's slope of Na Super Ionic Conductor sensor for SO 2 gas with the variation of concentration from 10 to 100 ppm was 167.14 ㎷/decade at the operating temperature of 500 ? C . The increase of oxygen partial pressure was not affected to the variation of Nernst's slope.e.

Keywords:NASICON;screen-print;SO 2 gas sensor

[References]

Saito Y, Kobayashi K, Maruyamam T, Solid State Ionics, 3-4, 393 (1981)
Gauthier M, Cahmberland A, J. Electrochem. Soc., 124, 1579 (1977)
Itoh M, Kozuka Z, J. Electrochem. Soc., 133, 1512 (1986)
Choi SD, Chung WY, Lee DD, Sens. Actuators B, 35, 263 (1996)
Ahmad A, Glasgow C, Wheat TA, Solid State Ion., 76(1-2), 143 (1995)
Khireddine H, Fabry P, Caneiro A, Bochu B, Sens. Actuators B, 40, 223 (1997)
Miura N, Yao S, Shimizu S, Yamazoe N, Sens. Actuators B, 3, 165 (1992)
Kim CJ, Chung JK, Lim SK, Rhee MH, The Korean journal of ceramics, 2, 25 (1996)
Boilet JP, Salanie JP, Desplancher G, Le Potier D, Mater. Res. Bull., 14, 1469 (1979)
Kida T, Miyachi Y, Shimanoe K, Yamazoe N, Sens. Actuators B, 80, 28 (2001)
Shimizu Y, Ushijima T, Solid State Ionics, 132, 143 (2000)
Lang T, Caron M, Izquierdo R, Ivanov D, Currie JF, Yelon A, Sens. Actuators B, 31, 9 (1996)
Meunier M, Izquierdo R, Hasnaoui L, Quenneville E, Ivanov D, Girard F, Morin F, Yelon A, Paleologou M, Appl. Surf. Sci., 127, 466 (1998)
Takahashi T, high Conductivity Solid ionic Conductors recent Trends and Applications 513 (1987) (1987)
Gaskell DR, Introduction to Metallurgical Thermodynamics second edition, pp.237 (1981) (1981)

[Related Articles]

[1] Saito Y, Kobayashi K, Maruyamam T, Solid State Ionics, 3-4, 393 (1981)

[2] Gauthier M, Cahmberland A, J. Electrochem. Soc., 124, 1579 (1977)

[3] Itoh M, Kozuka Z, J. Electrochem. Soc., 133, 1512 (1986)

[4] Choi SD, Chung WY, Lee DD, Sens. Actuators B, 35, 263 (1996)

[5] Ahmad A, Glasgow C, Wheat TA, Solid State Ion., 76(1-2), 143 (1995)

[6] Khireddine H, Fabry P, Caneiro A, Bochu B, Sens. Actuators B, 40, 223 (1997)

[7] Miura N, Yao S, Shimizu S, Yamazoe N, Sens. Actuators B, 3, 165 (1992)

[8] Kim CJ, Chung JK, Lim SK, Rhee MH, The Korean journal of ceramics, 2, 25 (1996)

[9] Boilet JP, Salanie JP, Desplancher G, Le Potier D, Mater. Res. Bull., 14, 1469 (1979)

[10] Kida T, Miyachi Y, Shimanoe K, Yamazoe N, Sens. Actuators B, 80, 28 (2001)

[11] Shimizu Y, Ushijima T, Solid State Ionics, 132, 143 (2000)

[12] Lang T, Caron M, Izquierdo R, Ivanov D, Currie JF, Yelon A, Sens. Actuators B, 31, 9 (1996)

[13] Meunier M, Izquierdo R, Hasnaoui L, Quenneville E, Ivanov D, Girard F, Morin F, Yelon A, Paleologou M, Appl. Surf. Sci., 127, 466 (1998)

[14] Takahashi T, high Conductivity Solid ionic Conductors recent Trends and Applications 513 (1987) (1987)

[15] Gaskell DR, Introduction to Metallurgical Thermodynamics second edition, pp.237 (1981) (1981)