입자 크기에 따른 ITO 후막 센서의 가스 감지 특성

신동원; 이상태; 전희권; 이덕동; 임정옥; 허증수; D.W. Shin; S.T. Lee; H.K. Jun; D.D. Lee; J.O. Lim; J.S. Huh

Korean Journal of Materials Research, Vol.13, No.2, 106-110, February, 2003

DOI10.3740/MRSK.2003.13.2.106 Export Citation

입자 크기에 따른 ITO 후막 센서의 가스 감지 특성

Gas Sensing Properties of Nanocrystalline ITO Thick Films with Different Particle Sizes

신동원, 이상태, 전희권, 이덕동¹, 임정옥², 허증수 ^†

경북대학교 금속공학과
¹경북대학교 전기전자공학부
²경북대학교 의용생체공학과

D.W. Shin, S.T. Lee, H.K. Jun, D.D. Lee¹, J.O. Lim², and J.S. Huh^†

Department of Materials Science and Metallurgy, Kyungpook National University, Daegu, Korea
¹School of Electronic and Electrical, Kyungpook National University, Daegu, Korea
²Department of Medical and Biomedical Engineering, Kyungpook National University, Daegu, Korea

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Nano-sized powders of Indium Tin Oxide(ITO) were synthesized by a coprecipitation method. In order to investigate the gas sensing characteristics in the nanocrystalline ITO thick films with various particle sizes, ITO powders with the average particle diameter of 15, 30, and 70 nm respectively were synthesized. And the sensitivity of ITO thick films was measured upon exposure to a target gas( C 2 H 5 /OH) and some other Volatile Organic Compounds(VOCs), such as, toluene, methanol, benzene, chloroform. As a result, ITO thick films had high sensitivity for ethanol and higher sensitivity with smaller particle size.

Keywords:ITO;sensor;coprecipitation method

[References]

Kohl D, Sens. Actuators, 18, 71 (1989)
Choi JD, Choi GM, Sens. Actuators B, 69, 120 (2000)
Solis JL, Saukko S, Kish L, Granqvist CG, Lantto V, Thin Solid Films, 391(2), 255 (2001)
Savage N, Chwieroth B, Ginwalla A, Patton B, Akbar S, Dutta P, Sens. Actuators B, 79, 17 (2001)
Yamaura H, Jinkawa T, Tamaki J, Moriya K, Miura N, Yamazoe N, Sens. Actuators B, 36, 325 (1996)
Yamazoe N, Sens. Actuators B, 5, 7 (1991)
Chung WY, Sakai G, Shimanoe K, Miura N, Lee DD, Yamaoze N, Sens. Actuators B, 46, 139 (1998)
Ivanovskaya M, Gurlo A, Bogdanov P, Sens. Actuators B, 77, 264 (2001)
Frank G, Kostlin H, Appl. Phys. A, 27, 197 (1982)
Hamberg I, Granqivst CG, J. Appl. Phys., 60(11), R123 (1986)
Sberveglieri G, Groppelli S, Sens. Actuators, 15, 235 (1988)
Patel NG, Makhija KK, Panchal CJ, Dave DB, Vaishnav VS, Sens. Actuators B, 23, 49 (1995)
Kim BC, Lee JH, Kim JJ, Ikegami T, Materials Letters, 52, 114 (2002)
Morrison SR, Sens. Actuators, 2, 329 (1982)
Wang YD, Chen ZX, Li YF, Zhou ZL, Wu XH, Solid-State Electron., 45(5), 639 (2001)
Xu C, Tamaki J, Miura N, Yamazoe N, Donki Kagaku, 58(12), 1143 (1990)
Xu C, Tamaki J, Miura N, Yamazoe N, Sens. Actuators B, 3, 147 (1991)

[Related Articles]

[1] Kohl D, Sens. Actuators, 18, 71 (1989)

[2] Choi JD, Choi GM, Sens. Actuators B, 69, 120 (2000)

[3] Solis JL, Saukko S, Kish L, Granqvist CG, Lantto V, Thin Solid Films, 391(2), 255 (2001)

[4] Savage N, Chwieroth B, Ginwalla A, Patton B, Akbar S, Dutta P, Sens. Actuators B, 79, 17 (2001)

[5] Yamaura H, Jinkawa T, Tamaki J, Moriya K, Miura N, Yamazoe N, Sens. Actuators B, 36, 325 (1996)

[6] Yamazoe N, Sens. Actuators B, 5, 7 (1991)

[7] Chung WY, Sakai G, Shimanoe K, Miura N, Lee DD, Yamaoze N, Sens. Actuators B, 46, 139 (1998)

[8] Ivanovskaya M, Gurlo A, Bogdanov P, Sens. Actuators B, 77, 264 (2001)

[9] Frank G, Kostlin H, Appl. Phys. A, 27, 197 (1982)

[10] Hamberg I, Granqivst CG, J. Appl. Phys., 60(11), R123 (1986)

[11] Sberveglieri G, Groppelli S, Sens. Actuators, 15, 235 (1988)

[12] Patel NG, Makhija KK, Panchal CJ, Dave DB, Vaishnav VS, Sens. Actuators B, 23, 49 (1995)

[13] Kim BC, Lee JH, Kim JJ, Ikegami T, Materials Letters, 52, 114 (2002)

[14] Morrison SR, Sens. Actuators, 2, 329 (1982)

[15] Wang YD, Chen ZX, Li YF, Zhou ZL, Wu XH, Solid-State Electron., 45(5), 639 (2001)

[16] Xu C, Tamaki J, Miura N, Yamazoe N, Donki Kagaku, 58(12), 1143 (1990)

[17] Xu C, Tamaki J, Miura N, Yamazoe N, Sens. Actuators B, 3, 147 (1991)