Environmental regulation has traditionally focused on specific phenomena and adopted the so-called end-of-pipe approach. Recently, however, the new environmental paradigm is more concerned with minimization of waste generation, efficient material and energy use, pollution prevention, etc. The basis of above concept is that one must consider the environmental impacts of a product not only during its manufacturing stage, but during all life stages. In the present study, the current status of LCA and its importance to environmental impacts have been reviewed. In the usual approach to LCA, screening LCA method has been used to promote international competition and define environmental concerns during semiconductor manufacturing. In the present study, a review of semiconductor manufacturing process and its environmental implication has been conducted to quantify the material and energy requirements, minimize the waste generation, and evaluate production cost. Recommended activities are also specified for process modification to improve the process efficiency.