Photo decomposition of gas phase benzene by TiO 2 thin films chemically deposited on alumina balls were investigated under UV irradiation. Photo decomposition rates were measured in real time during the reaction using a photo ionization detector, which ionizes C-H bonding of benzene molecules and then converts into volatile organic compounds (VOCs) concentrations. From the measuring results, the VOCs concentration increased instantly when IN irradiated because C-H bonds of benzene molecules strongly absorbed on the surface of TiO 2 films before the IN irradiation was destroyed by photo decomposition. After that, the VOCs concentration decreased with increasing surface area of TiO 2 and reaction time under the IN irradiation. At the optimal conditions for the photo decomposition of gas phase benzene, the reaction rate of the photo decomposition for high concentrations (over 60 ppm) was slow but that of relatively low concentration (under 60 ppm) was fast, due to limited surface area of TiO 2 thin films for the reaction. Thus, it is concluded that the photo decomposition rate was mainly affected by the surface area of TiO 2 or absorption reaction.