용액적하법으로 제조된 WO3 첨가 SnO2 박막의 가스감응 특성

최중기; 조평석; 이종흔; Joong-Ki Choi; Pyeong-Seok Cho; Jong-Heun Lee

Korean Journal of Materials Research, Vol.18, No.4, 193-198, April, 2008

DOI10.3740/MRSK.2008.18.4.193 Export Citation

용액적하법으로 제조된 WO3 첨가 SnO2 박막의 가스감응 특성

Gas Sensing Characteristics of WO3-Doped SnO2 Thin Films Prepared by Solution Deposition Method

최중기, 조평석, 이종흔 ^†

고려대학교 신소재공학부

Joong-Ki Choi, Pyeong-Seok Cho, and Jong-Heun Lee^†

Department of Materials Science and Engineering, Seoul 136-713, Korea

E-mail:

WO3-doped SnO2 thin films were prepared in a solution-deposition method and their gas-sensing characteristics were investigated. The doping of WO3 to SnO2 increased the response (Ra/Rg, Ra: resistance in air, Rg: resistance in gas) to H2 substantially. Moreover, the Ra/Rg value of 10 ppm CO increased to 5.65, whereas that of NO2 did not change by a significant amount. The enhanced response to H2 and the selective detection of CO in the presence of NO2 were explained in relation to the change in the surface reaction by the addition of WO3. The WO3-doped SnO2 sensor can be used with the application of a H2 sensor for vehicles that utilize fuel cells and as an air quality sensor to detect CO-containing exhaust gases emitted from gasoline engines.

Keywords:SnO2;WO3;gas sensor;solution deposition method

[References]

Yamazoe N, Sens. Actuators B., 108, 2 (2005)
Yamazoe N, Sens. Actuators B., 5, 7 (1991)
Comini E, Anal. Chem. Acta., 568, 28 (2006)
Cabot A, Arbiol J, Cornet A, Morante JR, Chen F, Liu M, Thin Solid Films, 436, 6469 (2003)
Choi US, Sakai G, Shimanoe K, Yamazoe N, Sens. Actuators B., 107, 397 (2005)
Chiorino A, Ghiotti G, Prinetto F, Carotta MC, Gnani D, Marinelli G, Sens. Actuators B., 58, 338 (1999)
Ivanovskaya M, Kotsikau D, Fagilia G, Nelli P, Irkaev S, Sens. Actuators B., 93, 422 (2003)
Baik NS, Sakai G, Shimanoe K, Miura N, Yamazoe N, Sens. Actuators B., 65, 97 (2000)
Wang SH, Chou TC, Liu CC, Sens. Actuators B., 94, 343 (2003)
Jinkawa T, Sakai G, Tamaki J, Miura N, Yamazoe N, J. Mol. Catal. A-Chem., 155(1-2), 193 (2000)
Tsuboi T, Ishii K, Tamura S, in Processings of the 17th International Colloquium on the Dynamics of Explosions and Reactive Systems ( Heidelberg, Germany, July 1999). (1999)
Lopatin SI, Shugurov SM, Semenov GA, Inorganic Materials, 41, 1340 (2005)
Kim SJ, Lee JH, J. Kor. Sens. Soc., 16, 11 (2007)
Kim KW, Cho PS, Kim SJ, Lee JH, Kang CY, Kim JS, Yoon SJ, Sens. Actuators B., 123, 318 (2007)
Choi YG, Sakai G, Shimanoe K, Yamazoe N, Sens. Actuators B., 101, 107 (2004)
Ruhland R, Becker R, Muller G, Sens. Actuators B., 50, 85 (1998)
Nakagawa H, Okazaki S, Asakura S, Fukuda K, Akimoto H, Takahashi S, Shigemori S, Sens. Actuators B., 65, 133 (2000)
Cho PS, Kim KW, Lee JH, J. Electroceram., 17, 975 (2006)

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[2] Yamazoe N, Sens. Actuators B., 5, 7 (1991)

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[4] Cabot A, Arbiol J, Cornet A, Morante JR, Chen F, Liu M, Thin Solid Films, 436, 6469 (2003)

[5] Choi US, Sakai G, Shimanoe K, Yamazoe N, Sens. Actuators B., 107, 397 (2005)

[6] Chiorino A, Ghiotti G, Prinetto F, Carotta MC, Gnani D, Marinelli G, Sens. Actuators B., 58, 338 (1999)

[7] Ivanovskaya M, Kotsikau D, Fagilia G, Nelli P, Irkaev S, Sens. Actuators B., 93, 422 (2003)

[8] Baik NS, Sakai G, Shimanoe K, Miura N, Yamazoe N, Sens. Actuators B., 65, 97 (2000)

[9] Wang SH, Chou TC, Liu CC, Sens. Actuators B., 94, 343 (2003)

[10] Jinkawa T, Sakai G, Tamaki J, Miura N, Yamazoe N, J. Mol. Catal. A-Chem., 155(1-2), 193 (2000)

[11] Tsuboi T, Ishii K, Tamura S, in Processings of the 17th International Colloquium on the Dynamics of Explosions and Reactive Systems ( Heidelberg, Germany, July 1999). (1999)

[12] Lopatin SI, Shugurov SM, Semenov GA, Inorganic Materials, 41, 1340 (2005)

[13] Kim SJ, Lee JH, J. Kor. Sens. Soc., 16, 11 (2007)

[14] Kim KW, Cho PS, Kim SJ, Lee JH, Kang CY, Kim JS, Yoon SJ, Sens. Actuators B., 123, 318 (2007)

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[16] Ruhland R, Becker R, Muller G, Sens. Actuators B., 50, 85 (1998)

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[18] Cho PS, Kim KW, Lee JH, J. Electroceram., 17, 975 (2006)