화학공학소재연구정보센터
Korean Journal of Materials Research, Vol.18, No.5, 247-252, May, 2008
펨토초 레이저를 이용한 평판 디스플레이 유리기판 절단 연구
Femto-Second Laser Glass Cutting for Flat Panel Display
E-mail:
A laser glass cutting system using a femto-second laser was evaluated for Flat Panel Display (FPD) glass. A theoretical analysis of the ablation threshold and depth is described using an explicit analytic form. Experiments for clean and deep grooves were performed using a 3W femto-second laser, and the relationships between the input energy and the scribing depth as well as the threshold energy are presented. Mechanical breaking after the scribing process was carried out and the results are compared with a theoretical method. It was found that a two-sided LCD panel glass can be cut clearly using the laser cutting method. The methodology was found to be very effective as a mass-production cutting system.
  1. Gamaly EG, Rode AV, Davies BL, Phys. Plasmas, 9, 949 (2002)
  2. Kim KR, Korean J. Mater. Res., 17(7), 352 (2007)
  3. Hassaun J, Laser Focus World, 35, 86 (1999)
  4. Zheng HY, Lee T, J. Micromech. Microeng., 15, 2093 (2005)
  5. Tsai CH, Chen HW, Int. J. Adv. Manuf. Technol., 23, 342 (2004)
  6. Kondrashov VI, Shitova LA, Litvinov VA, Surkov VV, Glass and Ceramics, 58, 9 (2001)
  7. Cheng J, Yen M, Wei C, Chuang Y, Young T, J. Micromech. Microeng., 15, 1147 (2005)
  8. Perry MD, Stuart BC, Banks PS, Feit MD, Yanovsky V, Rubenchik AM, J. Appl. Phys., 85, 6803 (1999)
  9. Tinten KS, Bialkowski J, CAvalieri A, Boing M, Schuler H, Linde DV, Proc. SPIE, 3343, 47 (1998)