Korean Journal of Materials Research, Vol.19, No.7, 376-381, July, 2009
롤투롤 스퍼터를 이용하여 PET 기판 위에 제조된 ITO 박막의 색도(b*) 및 투과도 연구
Chromaticity (b*) and Transmittance of ITO Thin Films Deposited on PET Substrate by Using Roll-to-Roll Sputter System
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Indium Tin Oxide (ITO) thin films on Polyethylene Terephtalate (PET) substrate were prepared by
Roll-to-Roll sputter system with targets of 5 wt% and 10 wt% SnO2 at room temperature. The influence of the chromaticity (b*) and transmittance properties of the ITO Films were investigated. The ITO thin films were deposited as a function of the DC power, rolling speed, and Ar/O2 gas flow ratio, and then characterized by spectrophotometer. Their crystallinity and surface resistance were also analyzed by X-ray diffractometer and 4-point probe. As a result, the chromaticity (b*) and transmittance of the ITO films were broadly dependenton the thickness, which was controlled by the rolling speed. When the ITO films were prepared with the DC power of 300 W and the Ar/O2 gas flow ratio of 30/1 sccm using 10 wt% SnO2 target as a function of the rolling speeds 0.01 through 0.10 m/min, its chromaticity (b*) and transmittance were about -4.01 to 11.28 and 75.76 to 86.60%, respectively. In addition, when the ITO films were deposited with the DC power of 400W and the Ar/O2 gas flow ratio of 30/2 sccm used in 5 wt% SnO2 target, its chromaticity (b*) and transmittance were about -2.98 to 14.22 and 74.29 to 88.52%, respectively.
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