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Korean Journal of Materials Research, Vol.20, No.5, 235-240, May, 2010
산화아연 나노구조 박막의 일산화탄소 가스 감지 특성
CO Gas Sensing Characteristics of Nanostructured ZnO Thin Films
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We investigated the carbon monoxide (CO) gas-sensing properties of nanostructured Al-doped zinc oxide thin films deposited on self-assembled Au nanodots (ZnO/Au thin films). The Al-doped ZnO thin film was deposited onto the structure by rf sputtering, resulting in a gas-sensing element comprising a ZnO-based actvie layer with an embedded Pt/Ti electrode covered by the self-assembed Au nanodots. Prior to the growth of the active ZnO layer, the Au nanodots were formed via annealing a thin Au layer with a thickness of 2 nm at a moderate temperature of 500oC. It was found that the ZnO/Au nanostructured thin film gas sensors showed a high maximum sensitivity to CO gas at 250oC and a low CO detection limit of 5 ppm in dry air. Furthermore, the ZnO/Au thin film CO gas sensors exhibited fast response and recovery behaviors. The observed excellent CO gas-sensing properties of the nanostructured ZnO/Au thin films can be ascribed to the Au nanodots, acting as both a nucleation layer for the formation of the ZnO nanostructure and a catalyst in the CO surface reaction. These results suggest that the ZnO thin films deposited on self-assembled Au nanodots are promising for practical high-performance CO gas sensors.
- Grimes CA, Dickey EC, Pishko MV, ed., Encyclopedia of Sensors, American Scientific Publishers. (2006)
- Aslam M, Chaudhary VA, Mulla IS, Sainkar SR, Mandale AB, Belhekar AA, Vijaymohanan K, Sens. Actuators A, 75, 162 (1999)
- Min Y, Tuller HL, Palzer S, Wollenstein J, Bottner H, Sens. Actuators B, 93, 435 (2003)
- Muller J, Weibenrieder S, Fresenius, J. Anal. Chem., 349, 380 (1994)
- Chang JF, Kuo HH, Leu IC, Hon MH, Sens. Actuators B, 84, 258 (2002)
- Lin MH, Tzeng SJ, Hsiau PJ, Tsai WL, Nanostructured Mater., 10, 465 (1998)
- Gong H, Hu JQ, Ong CH, Zhu FR, Sens. Actuators B, 115, 247 (2006)
- Chang SJ, Hsueh TJ, Chen IC, Huang BR, Nanotechnology, 19, 175502 (2008)
- Joshi RK, Hu Q, Alvi F, Joshi N, Kumar A, J. Phys. Chem. C, 113, 16199 (2009)
- Kang YJ, Oh DH, Song HJ, Jung JY, Jung H, Cho YS, Kim DJ, Korean J. Mater. Res., 18(5), 253 (2008)
- Park SM, Zhang SL, Huh JS, Korean J. Mater. Res., 18(7), 367 (2008)
- Park SY, Jung H, Ahn E, Nguyen LH, Kang Y, Kim H, Kim D, Korean J. Mater. Res., 18(12), 655 (2008)
- Kim DY, Son JY, Electrochem. Solid State Lett., 12(12), J109 (2009)
- Ahlers S, Muller G, Doll T, in Encyclopedia of Sensors, ed. by Grimes CA, Dickey EC, Pishko MV, American Scientific Publishers (2006). (2006)
- Nanto H, Minami TT, Takata S, J. Appl. Phys., 60, 482 (1986)
- Naisbitt SC, Pratt KFE, Williams DE, Parkin IP, Sens. Actuators B, 114, 969 (2006)
- Scott RWJ, Yang SM, Chabanis G, Coombs N, Williams DE, Ozin GA, Adv. Mater., 13(19), 1468 (2001)
- Conner WC, Falconer JL, Chem. Rev., 95(3), 759 (1995)