Production conditions of ZrC, Zr and C(graphite) condensed phases in the chemical vapor deposition process with ZrCl4-CH4-H-2-Ar precursor system have been investigated based on thermodynamic analyses using the FactSage code. The yields of condensed phases have been examined as functions of the injected reactant ratios of ZrCl4/ (ZrCl4 + CH4), H-2/(ZrCl4 + CH4) and Ar/(ZrCl4 + CH4), the temperature and the pressure. The results show that the yields strongly depend on the molar ratios of the ZrCl4/(ZrCl4+ CH4) and H-2/(ZrCl4+ CH4) injected reactant and on the temperature, but are insensitive to the inert gas Ar ratio and pressure. The co-deposition of ZrC with Zr or C(graphite) can be easily controlled by changing the ratios of ZrCl4/CH4 and H-2/(ZrCl4+ CH4). Process conditions such as high input amount of H-2, relatively low amount of Ar, low pressure and temperature above 1300 K are favorable for the deposition of ZrC. The results of this work will be helpful for further experimental investigation on different deposition conditions. (C) 2014 Elsevier B. V. All rights reserved.