Micro-patterned ZnO columnar structures on the surface of SnO2 film are prepared by combined photolithography and chemical vapor deposition processes. The ZnO patterned column/SnO2 film was employed as an anode of lithium ion batteries. The film deposition process is carried out by using the electron cyclotron resonance-metal organic chemical vapor deposition system. In order to investigate the relationship between the micro pattern and its electrochemical characteristics, X-ray diffraction, field emission-scanning electron microscopy and X-ray photoelectron spectroscopy are used. Field emission-scanning electron microscopy images revealed that the diameter of columnar ZnO ranges from 3 to 5 mu m. The highest reversible capacity of the micro-patterned anode exhibited 1725 mAhg(-1) at a current density of 200 mAg(-1). Based on our experimental results, ZnO micro-patterning at the interface of the electrode plays an important role in mitigating capacity fading during repetitive cycling. (C) 2013 Elsevier B.V. All rights reserved.