We report that a chemical patterning technique based on local plasma modification of self-assembled monolayers has been utilized to fabricate surfaces for domain liquid crystal alignment. Highly hydrophobic octadecyltrichlorosilane monolayers deposited on glass substrates coated with Indium-Tin-Oxide were brought into contact with elastomeric stamps comprising trenches on a micro scale, and then exposed to an oxygen plasma. In the regions exposed to the plasma the monolayer was etched away leaving a patterned surface that exhibited surface energy differences between surface domains. The surfaces that bear the micropatterns have been shown to be capable of producing patterned alignment of nematic liquid crystal. (C) 2013 Elsevier B.V. All rights reserved.