The microstructure and optical properties of crystalline ZnO-CeO2 thin films on glass substrate at various preheating temperatures, annealing temperatures and time were investigated. The relative intensity ratio values of the diffraction peaks of ZnO-CeO2 thin films and grain growth behavior were related to the preheating temperature, annealing temperature, and time. A suitable thermal treatment results in higher surface energy, which improves the surface morphology of the grown film. The ZnO-CeO2 thin films present high transparency (over 70%) in the visible region of the optical spectrum. (C) 2013 Elsevier B.V. All rights reserved.