Thin Solid Films, Vol.537, 212-216, 2013
Size dependent damping in axisymmetric vibrations of circular nanoplates
In this paper, the axisymmetric vibration of a circular nanoplate (NP) with clamped edge has been studied in the presence of size-dependent surface dissipation effects. Thin plate theory and the classic Zener model for internal damping are employed to obtain the lowest three natural frequencies as a function of the NP radius together with the associated mode shape deformations for selected material relaxation times. (C) 2013 Elsevier B.V. All rights reserved.
Keywords:Nanoelectromechanical systems;Microelectromechanical systems;Thin films;Oscillations;Surface damping