This paper presents glassy films of lithium phosphorus oxynitride electrolyte with an amorphous structure and improved ionic conductivity suitable for solid-state batteries. The films of lithium phosphorus oxynitride electrolyte were obtained by deposition using the RF sputtering technique in a reactive N-2 atmosphere. The measurements showed films with ionic conductivities in range of 10(-7)-10(-6) S.cm(-1), for temperatures between 22 degrees C and 43 degrees C. The depositions were done at several pressures (0.03 Pa, 0.7 Pa and 1 Pa) and for RF applied powers of 150 W and 200 W, in order to evaluate the best deposition set-point. The highest ionic conductivity of 10(-6) S.cm(-1) was measured under a practical room temperature of 35 degrees C on the best films. These results are comparable with the related state-of-the-art. (C) 2012 Elsevier B. V. All rights reserved.