Low-emissivity (low-E) coatings comprising a stack of multiple physical vapor deposited metallic and dielectric layers play an important role in energy management of modern buildings. The production process of such architectural glazings often requires that the coatings withstand a short-term thermal load of up to 700 degrees C. Here, we report on thermally-induced variations in the mechanical properties of representative large-area magnetron-sputtered low-E stacks on glass, developed specifically for high temperature stability. Coatings are investigated before and after heat treatment by bulge testing, curvature analyses using Stoney's equation, and nanoindentation. For as-deposited coatings, an in-plane residual compressive stress about 48 MPa and Young's modulus of 120 GPa are found, depending on the type of substrate. Short-term exposure to up to 700 degrees C converts this situation to in-plane residual tensile stress of >400 MPa, while Young's modulus decreases to about 105 GPa. These changes in the residual stress state are explained on the basis of structural, topological and dimensional changes in the coating stack. They identified as one of the primary factors governing temperature-resistance of low-E coatings. (C) 2012 Elsevier B.V. All rights reserved.