This article reviews the research and development of solar cells fabricated using the hot wire CVD (HWCVD) process. A short history of the technique is given, and the advantages of this deposition technique as they relate to solar cell fabrication are quantified. A chronological history of solar cell fabrication involving three major research groups, with a long history in HWCVD solar cell fabrication, is then given, as such histories illustrate the evolution of solar cell research involving HWCVD. Illustrative examples of activities of new research groups entering this field are then discussed, and the outlook for this field is given. (C) 2004 Elsevier Ltd. All rights reserved.