A transparent electrode consists of nanoporous silver thin film and molybdenum oxide was developed for transparent anode with advantages of low cost, large-area processing and room-temperature fabrication. High density nanoporous silver film was fabricated by controlling thickness and deposition rate during thermal evaporation. With silver thickness of 10 nm and 5 angstrom/s deposition rate, the MoOx/nanoporous Ag/MoOx multilayer structure achieved similar to 9 Omega/sq sheet resistance and similar to 70% transparency. Compared to the indium-tin-oxide (ITO) anode, the nanoporous anode/SubPc/C-60/BCP/Al photovoltaic device has an enhanced surface-plasmon absorption and a higher fill factor. Although its transparency is lower than ITO, the nanoporous anode achieved 3.45% power conversion efficiency, comparable to ITO-based devices. (C) 2013 Elsevier B.V. All rights reserved.