There is a significant push to increase the output power of thermoelectric generators (TEGs) in order to make them more competitive energy harvesters. The thermal coupling of TEGs has a major impact on the effective temperature gradient across the generator and therefore the power output achieved. The application of micro fluidic heat transfer systems (mu HTS) can significantly reduce the thermal contact resistance and thus enhance the TEG's performance. This paper reports on the characterization and optimization of a mu TEG integrated with a two layer mu HTS. The main advantage of the presented system is the combination of very low heat transfer resistances with small pumping powers in a compact volume. The influence of the most relevant system parameters, i.e. microchannel width, applied flow rate and the mu TEG thickness on the system's net output performance are investigated. The dimensions of the pl-ITS/ mu TEG system can be optimized for specific temperature application ranges, and the maximum net power can be tracked by adjusting the heat transfer resistance during operation. A system net output power of 126 m W/cm(2) was achieved with a module ZT of 0.1 at a fluid flow rate of 0.07 I/min and an applied temperature difference of 95K. It was concluded that for systems with good thermal coupling, the thermoelectric material optimization should focus more on the power factor than on the figure of merit ZT itself, since the influence of the thermal resistance of the TE material is negligible. (C) 2013 Elsevier Ltd. All rights reserved.