A multiphonon-assisted model included in a Poisson-Schroedinger solver has been applied to the calculation of the capture/emission trapping rates of CMOS oxide interface defects. The dependencies of trap capture cross-sections with trap energy, depth, applied bias and temperature have been extracted, with the purpose of evaluating the accuracy of constant cross-section models adopted in compact and empirical approaches. The model has been applied to the extraction of interface trap concentrations and to the accurate AC analysis of the trap frequency response. (C) 2011 Elsevier Ltd. All rights reserved.