Solid-State Electronics, Vol.65-66, 9-15, 2011
Dual strained channel CMOS in FDSOI architecture: New insights on the device performance
We report an original Dual Strained Channel On Insulator (DSCOI) Fully Depleted CMOS architecture by co-integrating nFETs on sSOI and pFETs on Si/c-SiGe/(s)SOI with a TiN/HfO2 gate stack (EOT = 1.15 nm) and down to 40 nm gate lengths. We demonstrate for the first time large gains for transconductance (up to +125%) and mobility (+100%) even for short channel pFETs. This enables us to improve the ON(OFF) pFETs trade-off (I-ON + 23% for a given I-OFF = 100 nA/mu m), and thus to obtain similar I-ON for n and pFETs (similar to 650 mu A/mu m at V-DD = 1 V). Meanwhile, thanks to a channel material/strain engineering, the threshold voltages are adjusted (V-th similar to +/- 0.2 V) for high performance (HP) CMOS with a single mid-gap metal gate. Extracted interface trap densities (N-T = 5-8.5 x 10(17) cm(-3) eV(-1)) using low frequency noise indicate the excellent integrity of the TiN/HfO2 stack when compared to SOI reference samples. (C) 2011 Elsevier Ltd. All rights reserved.
Keywords:CMOS;MOSFET;Dual channel;Integration;Silicon-germanium;SOI;Strain;High-K;Metal gate;Mobility;Access resistance;Low-frequency noise