Nanofiltration of tetramethyl ammonium hydroxide (TMAH) was investigated using an MFI-type zeolite-coated membrane. The membrane could be successfully prepared on an cc-alumina support by hydrothermal synthesis. The MFI-type zeolite powder possesses a high adsorption capacity for TMAH at all pH values, with maximum adsorption amount determined by Langmuir adsorption mechanism of 0.593 mmol/g at pH = 11.63, because it presents a negatively charged surface. Nanofiltration of TMAH can thus be achieved through both molecular sieve and adsorption mechanisms by MFI-type zeolite. The MFI-type zeolite-coated membrane can be repeatedly used for nanofiltration, with backwashing with a dilute hydrochloric solution between cycles. (C) 2013 Elsevier B.V. All rights reserved.