Thin film of yttria stabilized zirconia (YSZ) was prepared on alumina substrates by applying an electron beam physical vapor deposition (EB-PVD) method. The morphology and deposition behavior of the coating layer were investigated using atomic force microscope, secondary electron microscope, and X-ray difractometer. The electrical conductivity of the YSZ coating layer was also evaluated. The fracture microstructure of YSZ electrolyte film, which was deposited with thickness of 10 mu m, has showed a columnar structure. Also, the activation energy of the coating layer was similar to that of bulk YSZ.