This research investigated the water purification performance of thin film with anatase phase TiO2 powder having good photocatalytic property using an innovative aerosol deposition method at the normal room temperature. Fresh raw powder was dehydrated for good dispersion of TiO2 powder. To suppress the formation of second particle, the powder was dispersed for 90 minutes in alcohol bath with ultrasonic treatment and then desiccated. The average grain size of particle was identified to be 1 mu m in TiO2 thin film deposited on stainless steel mesh by scanning electron microscopy (SEM). The anatase phase of TiO2 thin film was investigated by X-ray diffraction (XRD). The anatase phase of fresh raw powder was favorably maintained after aerosol deposition treatment.