Materials Science Forum, Vol.502, 263-268, 2005
Nano-scale stress microscopy of ceramic materials using their cathodoluminescence emission
An overview is given of our recent research achievements in nano-scale stress microscopy based on cathodoluminescence (CL) piezo-spectroscopy (PS) studies of ceramics. The main underlying concepts of CL nano-scale microscopy are presented, with emphasis placed on the spatial resolution of the electron probe operating at low voltages in a field-emission gun scanning electron microscope (FEG-SEM). The stress assessment technique shown here proves its general validity independent of the physical mechanisms behind the CL emission. A table, including CL spectra from impurities, defects and electron-hole recombination, is given of the stress dependence of the wavelength of selected CL bands from various ceramics of industrial use, including a reliability assessment of these dependences. Finally, some applications of nano-scale stress microscopy are shown and brief comments are offered regarding possible future evolutions and impacts on the development of new materials and devices.