화학공학소재연구정보센터
Materials Science Forum, Vol.495-497, 1333-1342, 2005
Texture in thin films
First, a brief overview is given of different experimental methods that can be used to characterize texture (x-ray diffraction pole figure measurements and electron backscattered diffraction), with an emphasis on the challenges that are presented by the small grain size and limited amount of material present in thin film samples. Second, a classification is presented of the types of texture that have been reported for thin films, and various terminologies are discussed (fiber texture, in-plane texture, biaxial texture, epitaxy, epitaxial alignment and axiotaxy). Finally, several driving forces are described that can cause texture selection and texture evolution in thin films.