Materials Science Forum, Vol.490-491, 649-654, 2005
Sensitivity of a rotating beam sensor for stress evaluation in aluminium thin films
dos Santos JMM,
Pina JCP,
Batista AC,
Horsfall AB,
Wang K,
Wright NG,
Soare SM,
Bull SJ,
O'Neill AG,
Terry JG,
Walton AJ,
Gundlach AM,
Stevenson JTM
