Materials Science Forum, Vol.457-460, 973-976, 2004
Modeling of the influence of Schottky barrier inhomogeneities on SiC diode characteristics
In this paper, we report on the simulation of Schottky barriers on SiC. In the past, several approaches have been made to understand the non-ideal behavior of Schottky diodes. We performed 2D simulations of the influence of barrier inhomogeneities (local barrier lowering) on the potential distribution and the current-voltage characteristics of Schottky barrier diodes. It is shown that two different groups of barrier inhomogeneites have to be considered. Barrier inhomogeneities with large lateral dimensions result in a "bulky" shape of the current-voltage characteristics. Barrier inhomogeneities of small lateral dimensions lead to a ideality factor greater then one (non-ideal behavior). An analytical model which is based on pure electrodynamics has been applied and compared to previous modcls from literature.