화학공학소재연구정보센터
Materials Science Forum, Vol.457-460, 593-596, 2004
Optical characterization of full SiC wafer
Different optical characterization tool for mapping of SiC electrical properties (mobility, free carrier concentration, doping, minority carrier effective lifetime) are reviewed. For each technique, advantages and drawbacks are discussed and the domain of use is presented. An original approach to determine the minority carrier lifetime from room temperature PL intensity is more particularly developed.