화학공학소재연구정보센터
Materials Science Forum, Vol.433-4, 965-968, 2002
Improved understanding and optimization of SiC nearly solar blind UV photodiodes
The high UV detection performances of 6H-SiC Schottky and pn photodiodes with oxide ramp termination. The impact of diode's bias as well as the linearity of their photoresponse on a large light power range has been revealed by extensive numerical simulations and measurements. The proposed photodetectors can be operated up to elevated temperatures (800K). A new analytical model of quantum efficiency is confirmed by simulated data.