화학공학소재연구정보센터
Materials Science Forum, Vol.433-4, 467-470, 2002
Electrical and optical study of 4H-SiC CVD epitaxial layers irradiated with swift heavy ions
Radiation defects and electrical properties in 4H-SiC epitaxial layer bombarded with 245 MeV Kr ions were studied using deep level transient spectroscopy (DLTS), photoluminescence and electrical measurements. Capacitance -, current - and charge - DLTS spectra have shown the presence mainly of Z1 (0.66 eV) deep level similar to those obtained for electrons, neutrons and light ions. The temperature dependence of electrical resistivity of 4H-SiC structures with Schottky barriers was characterized by two stages that was connected with compound mechanism of the defects formation in SiC during heavy ions irradiation.