화학공학소재연구정보센터
Materials Science Forum, Vol.433-4, 103-106, 2002
Heat transfer modeling of a new crystal growth process
Modeling and simulation were used to evaluate a new reactor concept for SiC bulk growth. In this reactor, we succeed to fulfill thermal conditions for CVD deposition from tetramethylsilane dilute in argon and subsequent sublimation and condensation on a seed. Heat transfer modeling allowed to visualize the influence of gas flow in the reactor and temperature distribution on the seed and in the SiC deposition area. The results have been compared with experimental results.