Materials Science Forum, Vol.404-7, 35-40, 2002
Assumptions in thin film residual stress methods
A methodology to develop new analytical methods based on an analysis of assumptions of existing methods is presented. This 'philosophical' approach is applied to X-ray diffraction methods for the analysis of residual stress in thin films. An overview of the possibilities for the combination of three different assumptions is given in this paper and discussed using a 3-dimensional graph as a base. Also a newly discovered thin film residual stress method is discussed and demonstrated on experimental data.