Materials Science Forum, Vol.389-3, 1387-1390, 2002
Surface control of 4H-SiC MESFETs
Silicon Carbide MESFETs have been fabricated using two different process flows. It is shown that surface passivation with a thermally grown oxide, combined with a gate recess, results in reduced current instability. It is also shown that these devices operate well at 400degreesC.