화학공학소재연구정보센터
Materials Science Forum, Vol.389-3, 1247-1250, 2002
Realization of a high-current and low R-ON 600V current-limiting device
The first experimental results of a 600 V 4H-SiC current limiting device are shown. This device limits the current as the bias voltage increases. The forward conduction is ensured by an N type implanted channel (doping species: nitrogen) on top of a P+ implanted layer (doping species: aluminum). The prototypes reach a saturation current density of 900 Acm(-2), with a specific on-resistance of 13 mOmegacm(2). The 4H-SiC current limiting devices belong to the best set of Accu-MOSFETs devices reported in the literature.