Three relaxation spectra originating from irreversible, reversible wall motion, and reversible magnetization rotation processes are decomposed from the measured spectra of complex permeability for rectangular 3% SiFe samples with various cut angle a with respect to the [001] direction. The static permeabilities and relaxation frequencies of each relaxation processes are determined from the decomposed spectra as function of the angle a. The relaxation frequencies are about 2.43 kHz for the irreversible wall motion, 26.5 kHz for reversible wall motion, and 205 kHz for reversible magnetization rotation, respectively. The static permeabilities of irreversible and reversible wall motion rapidly decrease as a increases. However, the static permeability of reversible magnetization rotation becomes dominant for the samples with large angle alpha greater than or equal to 70 degrees.