The scanning tunneling microscopy (STM) study of (CoFe)-(HfO2) and (CoFe)-(Al2O3) granular thin films were carried out at room temperature in a vacuum 5(.)10(-4) Pa using a W tip, The films have been prepared by the electron-beam coevaporation of CoFe and dielectrics HfO2, Al2O3 in a vacuum 10(-6) Pa and they revealed the GMR effect. STM topographic images demonstrate nanoscale bright round-shaped spots on a dark background, which we consider to be metal granules of CoFe in the nonmetal matrices of HfO2 and Al2O3. The previous scanning tunneling spectroscopy investigations of the Co36Al22O42 thin film confirms this interpretation [1]. The quantity of metal granules per square unit is very close to that obtained using the TEM micrographs.