Surface oxidation processes play a key role in understanding electrochemical properties of boron-doped diamond (BDD) electrodes. The type of surface termination groups, which create the potential window of electrolytic water stability or hydrophobicity, influences such properties. In this study the kinetics of oxidation process under anodic polarization were studied in situ by means of Dynamic Electrochemical Impedance Spectroscopy (DEIS) technique. This novel approach allows for obtaining the impedance data for non-stationary systems. It has been proven that for [B] dopant level of 10k ppm, polarization to 1.5 V vs. Ag|AgCl is sufficient to initiate transformation of the film terminating BDD electrodes. XPS analysis and wettability measurements confirmed oxidation under given conditions. (C) 2014 The Electrochemical Society. All rights reserved.