We report here the formation of an electrode through a selective electroless plating process. It consists of pre-treatment, selected Ni electroless plating, and Cu electroless chemical plating. Through the selective electrode formation technique using Pd/Ni/Cu, we established a high-efficiency and low-cost process for the manufacture of crystalline silicon solar cells. Measurements with a solar simulator showed that an open-circuit voltage of 0.684 V, short-circuit current density of 32.3 mA/cm(2), form factor of 75.39%, and an efficiency of 18.21% was obtained for a monocrystalline silicon solar cell. (C) 2014 The Electrochemical Society. All rights reserved.