Synthesis of ordered mesoporous RuOx electrodes was conducted by electro-deposition using a lyotropic liquid crystal template method with Ti substrates and subsequent electro-oxidation. The obtained ordered mesoporous Ru metal was characterized by XRD, TEM and electrochemical measurements in 0.5 M H2SO4. After electro-oxidation by potential cycling, the ordered mesoporous RuOx afforded specific capacitance of similar to 400 F (g-Ru)(-1). A micro-supercapacitor with ordered mesoporous RuOx was fabricated by controlled electro-deposition of ordered mesoporous RuOx on an inter-digitated array electrode (IDA; 10 mu m electrode width, 5 mu m gap and 65 x 2 electrodes). This micro-supercapacitor exhibited good capacitive property with maximum specific capacitance of 12.6 mF cm(-2) and specific energy of 12.5 Wh (kg-Ru)(-1) based on the mass of the deposited material. (C) 2012 Elsevier B.V. All rights reserved.