Palladium films were fabricated by a novel colloidal spray deposition method. Dense, crack-free Pd films with thickness of 5-11 mu m were successfully fabricated on porous yttria-stabilized zirconia (YSZ) substrates having pore size of 3-7 mu m. Scanning electron microscopy showed that the film has uniform thickness and is well bonded to the substrate. The surface oft he Pd film is composed of well-crystallized plate-like grains with diameter of 2-4 mu m and has a rough texture. The X-ray diffraction pattern of the as-sintered Pd film indicates (111) preferred crystal orientation. The hydrogen permeation properties of the films were investigated at temperatures of 330-530 degrees C using 90% H-2/balance He and N-2 as feed and sweep gases, respectively. The hydrogen permeation of the supported Pd films with thickness of 5-11 mu m was limited by both the diffusion of hydrogen through the metal bulk and the gas-phase transport through the support. The resistance of the gas-phase transport through the substrate was lowered significantly by reducing the thickness of the substrate. (c) 2012 Elsevier B.V. All rights reserved.