Journal of Crystal Growth, Vol.402, 234-242, 2014
Improvements in epitaxial lateral overgrowth of InP by MOVPE
Indium phosphide and silicon play important and complementary roles in communications wavelength photonic devices. Realizing high quality coalesced epitaxial lateral overgrown (ELO) InP films on Si could greatly reduce cost and encourage the proliferation of energy efficient photonic integrated circuits in consumer devices. By adjusting a parallel line ELO mask and metalorganic vapor phase epitaxial growth conditions, we have fully coalesced and partially coalesced epitaxial lateral overgrowth of InP on InP substrates and Si substrates having strain relaxed III/V buffer layers, respectively. Extended defects were investigated using transmission electron microscopy and were not found to originate at the coalescence of the nearest neighbor growth fronts for linear parallel growth windows oriented 60 off of [0-11] when using a high V/Ill ratio of 406. In addition, narrowly separated linear parallel growth windows having a large aspect ratio of 7.5 were seen to inhibit the upward propagation of stacking faults through several neighboring openings. Elimination of these two defect sources would leave primarily the challenge of optimizing the morphology of the overgrown InP as a substantial barrier to achieving coalesced ELO InP of sufficient quality for photonic device applications. (C) 2014 The Authors. Published by Elsevier B.V.
Keywords:Defects;Metalorganic vapor phase epitaxy;Metalorganic chemical vapor deposition;Organometallic vapor phase epitaxy;Selective epitaxy;Semiconducting indium phosphide